Microelectronics has not only triggered the enormous growth in information and communication technologies but it has also become an important factor in many other areas. In recent years, technologies originally developed for microelectronics have been increasingly applied to the fabrication of miniaturized systems in electromechanical, electro-optical, analytical or biomedical applications. The new discipline is called microsystem technology. The future development will certainly result in the integration of microsystem components with microelectronic devices.